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Publications

１．著書

　

  1. 豊田　紀章、山田　公「光デバイス精密加工ハンドブック」（板生　清　他編）2003年、オプトロニクス社、pp.200-205

  2. 豊田　紀章、山田　公「インテリジェント材料・技術の最新開発動向」（インテリジェント材料システムフォーラム　編）2003年、シーエムシー出版、pp.191-201

  3. 豊田　紀章「クラスターイオンビーム基礎と応用」（山田　公　編著）2006年、日刊工業新聞社、pp.40-48, 69-79, 82-86, 90-96, 100-107, 131-134, 145-153, 163-167, 176-181, 198-202.

  4. N. Toyoda and S. Matsui, “Comprehensive Materials Processing” (S. Hashmi, editor -in-chief), 2014, Elsevier Ltd., pp. 187-200.

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２．研究業績リスト

（１）査読付き論文

 

  1. I. Yamada, J. Matsuo, Z. Insepov, D. Takeuchi, M. Akizuki and N. Toyoda, “Surface processing by gas cluster ion beams at the atomic(molecular) level”, J. Vac. Sci. Technol. A, 14, (1996), 781-785.

  2. A. Yoshida, M. Deguchi, M. Kitabatake, T. Hirao, J. Matsuo, N. Toyoda and I. Yamada, “Atomic Level Smoothing of CVD Diamond Films by Gas Cluster Ion Beams Etching”, Nucl. Instrum. Methods Phys. Res., Sect. B, 112, (1996), 248-251.

  3. J. Matsuo, N. Toyoda and I. Yamada, “Nanofabrication technology by gas cluster ion beams”, J. Vac. Sci. and Technol. B, 14, (1996), 3951 -3954.

  4. J. Matsuo, N. Toyoda, M. Akizuki and I. Yamada, “Sputtering of elemental metals by Ar cluster ions”, Nucl. Instrum. Methods Phys. Res., Sect. B, 121, (1997), 459-463.

  5. N. Toyoda, H. Kitani, J. Matsuo and I. Yamada, “Reactive Sputtering by SF6 Cluster Ion Beams”, Nucl. Instrum. Methods Phys. Res., Sect. B, 121, (1997), 484-488.

  6. H. Kitani, N. Toyoda, J. Matsuo and I. Yamada, “Incident angle dependence of the sputtering effect of Ar cluster ion bombardment”, Nucl. Instrum. Methods Phys. Res., Sect. B, 121, (1997) 489-492.

  7. W. K. Chu, Y. P. Li, J. R. Liu, J. Z. Wu, S. C. Tidrow, N. Toyoda, J. Matsuo and I. Yamada, “Smoothing of YBa2Cu3O7-d films by ion cluster beam bombardment”, Appl. Phys. Lett., 72, (1998), 246-248.

  8. N. Toyoda, H. Kitani, N. Hagiwara, J. Matsuo and I. Yamada, “Surface smoothing effects with reactive cluster ion beams”, Mater. Chem. Phys., 54, (1998), 106-110.

  9. N. Toyoda, H. Kitani, N. Hagiwara, T. Aoki, J. Matsuo and I. Yamada, “Angular distributions of the particles sputtered with Ar cluster ions”, Mater. Chem. Phys., 54, (1998), 262-265.

  10. I. Yamada, J. Matsuo, N. Toyoda, T. Aoki, E. C. Jones and Z. Insepov, “Non-linear processes in the gas cluster ion beam modification of solid surfaces", Mater. Sci. Eng. A, 253, (1998), 249-257.

  11. N. Toyoda, N. Hagiwara, J. Matsuo and I. Yamada, “Surface treatment of diamond films with Ar and O2 cluster ion beams”, Nucl. Instrum. Methods Phys. Res., Sect. B, 148, (1999), 639-644.

  12. J. Matsuo, E. Minami, M. Saito, N. Toyoda, H. Katsumata and I. Yamada, “High-intensity oxygen cluster ion beam generation and its application to cluster ion-assisted deposition”, Eur. Phys. J. D, 9, (1999), 635-638.

  13. N. Toyoda, N. Hagiwara, J. Matsuo and I. Yamada, “Surface smoothing mechanism of gas cluster ion beams.”, Nucl. Instrum. Methods Phys. Res., Sect. B, 161-163, (2000), 980-985.

  14. I. Yamada, J. Matsuo, Z. Insepov, T. Aoki, T. Seki and N. Toyoda, “Nano-processing with gas cluster ion beams”, Nucl. Instrum. Methods Phys. Res., Sect. B, 164-165, (2000), 944-959.

  15. J.A. Greer, D. B. Fenner, J. Hautala, L.P. Allen, V. DiFilippo, N. Toyoda, I. Yamada, J. Matsuo, E. Minami and H. Katsumata “Etching, smoothing, and deposition with gas-cluster ion beam technology”, Surf. Coat. Technol., 133, (2000), 273-282.

  16. I. Yamada, J. Matsuo, N. Toyoda and A. Kirkpatrick, “Materials processing by gas cluster ion beams”, Mater. Sci. Eng., R34, (2001), 231-295.

  17. N. Toyoda, J. Matsuo, T. Aoki, I. Yamada and D. B. Fenner, "Secondary Ion Mass Spectrometry with Gas Cluster Ion Beams", Nucl. Instrum. Methods Phys. Res., Sect. B, 190, (2002), 860-864.

  18. K. Shirai Y. Fujiwara, R. Takahashi, N. Toyoda, S. Matsui, T. Mitamura, M. Terasawa and I. Yamada, "Optical Thin Film Formation with O2 Cluster Ion Assisted Deposition“, Jpn. J. Appl. Phys., 41, (2002), 4291-4294.

  19. N. Toyoda, S. Matsui and I. Yamada, "Ultra-smooth surface preparation with Gas Cluster Ion Beams.", Jpn. J. Appl. Phys., 41, (2002), 4287-4290.

  20. N. Toyoda, J. Matsuo, T. Aoki, I. Yamada and D. B. Fenner, “Secondary ion mass spectrometry with gas cluster ion beams”, Appl. Surf. Sci., 203-204, (2003), 214-218.

  21. T. Kitagawa, I. Yamada, N. Toyoda, H. Tsubakino, J. Matsuo, G.H. Takaoka and A. Kirkpatrick,” Hard DLC film formation by gas cluster ion beam assisted deposition”, Nucl. Instrum. Methods Phys. Res., Sect. B, 201, (2003), 405-412.

  22. R.C. Bircher, A.W. McCormick, P.M. Baldo, N. Toyoda and I. Yamada, “Gold nanoparticles sputtered by single ions and clusters”, Nucl. Instrum. Methods Phys. Res., Sect. B, 206, (2003), 851-854.

  23. Y. Fujiwara, N. Toyoda, K. Mochiji, T. Mitamura and I. Yamada, “Reduction of surface roughness by Ta2O5 film formation with O2 cluster ion assisted deposition”, Nucl. Instrum. Methods Phys. Res., Sect. B, 206, (2003), 870-874.

  24. K. Miyauchi, T. Kitagawa, N. Toyoda, S. Matsui, K. Mochiji, T. Mitamura and I. Yamada, “Optimization of flux ratio of C60 molecule to Ar cluster ion for diamond-like carbon film deposition by NEXAFS measurement”, Nucl. Instrum. Methods Phys. Res., Sect. B, 206, (2003), 893-897.

  25. N. Toyoda, Y. Fujiwara and I. Yamada, “Stable optical thin film deposition with O2 cluster ion beam assisted deposition”, Nucl. Instrum. Methods Phys. Res., Sect. B, 206, (2003), 875-879.

  26. T. Kitagawa, K. Miyauchi, N. Toyoda, K. Kanda, T. Ikeda, H. Tsubakino, J. Matsuo, S. Matsui and I. Yamada, “Influence of residual Ar+ in Ar cluster ion beam for DLC film formation”, Nucl. Instrum. Methods Phys. Res., Sect. B, 206, (2003), 884-888.

  27. T. Aoki, J. Matsuo, G.H. Takaoka, N. Toyoda and I. Yamada, “Defect characteristics by boron cluster ion implantation”, Nucl. Instrum. Methods Phys. Res., Sect. B, 206, (2003), 855-860.

  28. I. Yamada, J. Matsuo and N. Toyoda, “Cluster ion beam process technology”, Nucl. Instrum. Methods Phys. Res., Sect. B, 206, (2003), 820-829.

  29. T. Kitagawa, K. Miyauchi, K. Kanda, Y. Shimizugawa, N. Toyoda, H. Tsubakino, S. Matsui, J. Matsuo and I. Yamada “Near edge X-ray absorption fine structure study for optimization of hard DLC film formation with Ar cluster ion beam”, Jpn. J. Appl. Phys., 42, (2003), 3971-3975.

  30. N. Toyoda, J. Matsuo and I. Yamada, “Surface modification with gas cluster ion beams from fundamental characteristics to applications”, Nucl. Instrum. Methods Phys. Res., Sect. B, 216, (2004), 379-389.

  31. N. Toyoda and I. Yamada, “Optical thin film formation by oxygen cluster ion beam assisted depositions”, Appl. Surf. Sci., 226, (2004), 231-236.

  32. S. Inoue, N. Toyoda, H. Tsubakino and I. Yamada “Incident angle dependence of O2 cluster ions on Ta2O5 thin film properties”, Jpn. J. Appl. Phys., 43, (2004), 3951-3954.

  33. T. Kitagawa, K. Miyauchi, N. Toyoda, H. Tsubakino and I. Yamada “Optimum incident angle of Ar cluster ion beam for superhard carbon film deposition”, Jpn. J. Appl. Phys., 43, (2004), 3955-3958.

  34. J. Matsuo, C. Okubo, T. Seki, T. Aoki, N. Toyoda and I. Yamada, “A new secondary ion mass spectrometry (SIMS) system with high-intensity cluster ion source”, Nucl. Instrum. Methods Phys. Res., Sect. B, 219-220, (2004), 463-467.

  35. M. Nagano, S. Yamada, S. Akita, S. Houzumi, N. Toyoda and I.Yamada “Low-damage sputtering of GaAs and GaP using size-selected Ar cluster ion beams”, Jpn. J. Appl. Phys., 44, (2005), L164-166.

  36. I. Yamada and N. Toyoda “Current research and development topics on gas cluster ion-beam processes”, J. Vac. Sci. Technol. A, 23, (2005), 1090-1099.

  37. I. Yamada and N. Toyoda, “Summary of recent research on gas cluster ion beam process technology”, Nucl. Instrum. Methods Phys. Res., Sect. B, 232, (2005), 195-199.

  38. N. Toyoda, T. Mashita and I. Yamada, “Nano structure formation by gas cluster ion beam irradiations at oblique incidence”, Nucl. Instrum. Methods Phys. Res., Sect. B, 232, (2005), 212-216.

  39. S. Inoue, N. Toyoda, H. Tsubakino and I. Yamada, “Morphological evolution of surfaces irradiated by gas cluster ion beams during thin film deposition”, Nucl. Instrum. Methods Phys. Res., Sect. B, 237, (2005), 449-454.

  40. Y. Nakayama, S. Houzumi, N. Toyoda, K. Mochiji, T. Mitamura and I. Yamada, “Irradiation of silicon surface by Ar cluster ion beam: Cluster size effects”, Nucl. Instrum. Methods Phys. Res., Sect. B, 237, (2005), 449-454.

  41. T. Nose, S. Inoue, N. Toyoda, K. Mochiji, T. Mitamura and I. Yamada, “Development of pure O2 cluster ion beam assisted deposition system”, Nucl. Instrum. Methods Phys. Res., Sect. B, 241, (2005), 626-629.

  42. K. Ohwaki, Y. Dake, N. Toyoda and I. Yamada, “Development of a new cluster size selector”, Nucl. Instrum. Methods Phys. Res., Sect. B, 241, (2005), 614-617.

  43. I. Yamada and N. Toyoda, “Recent advances in R&D of gas cluster ion beam processes and equipment”, Nucl. Instrum. Methods Phys. Res., Sect. B, 241, (2005), 589 -593.

  44. N. Toyoda, S. Houzumi and I. Yamada, “Development of a size-selected gas cluster ion beam system for low-damage processing”, Nucl. Instrum. Methods Phys. Res., Sect. B, 241, (2005), 609-613.

  45. S. Houzumi, K. Mochiji, N. Toyoda and I. Yamada, “Scanning Tunneling Microscopy Observation of Graphite Surfaces Irradiated with size-selected Ar cluster ion beams”, Jpn. J. Appl. Phys., 44, (2005), 6252-6254.

  46. H. Kageyama, T. Asanuma, T. Takeuchi, K. Kadono, J. Matsuo, T. Seki, T. Kitagawa, N. Toyoda, Y. Shimizugawa and T. Uruga, “Glancing Angle Fluorescence XAFS Study on Metal Oxide Thin Films Obtained by Oxygen Gas Cluster Ion Beam Assisted Deposition Techniques”, Physica Scripta, T115 (2005), 504-506.

  47. N. Toyoda, S. Houzumi and I. Yamada, “Development of size-selected cluster ion irradiation system”, Nucl. Instrum. Methods Phys. Res., Sect. B, 242, (2006), 466-468.

  48. I. Yamada and N. Toyoda, “Current research topics and applications of gas cluster ion beam processes”, Nucl. Instrum. Methods Phys. Res., Sect. B, 242, (2006), 143-145.

  49. S. Yamada, M. Nagano, S. Houzumi, N. Toyoda and I. Yamada, “Mesa structures of GaAs fabricated by nanoparticle mask under gas-cluster ion-beam irradiation”, J. Vac. Sci. Technol. B, 25, (2007), 289-291.

  50. H. Isogai, E. Toyoda, T. Senda, K. Izunome, K. Kashima, N. Toyoda and I. Yamada, “Study of Si wafer surfaces irradiated by gas cluster ion beams”, Nucl. Instrum. Methods Phys. Res., Sect. B, 257, (2007), 683-686.

  51. J. Matsui, K. Fukuda, A. Kamakura, Y. Tsusaka, Y. Kagoshima, N. Toyoda and I. Yamada, “Structure estimation of diamond-like carbon films by synchrotron X-ray reflectivity measurement”, Nucl. Instrum. Methods Phys. Res., Sect. B, 261, (2007), 634-638.

  52. K. Nakamura, S. Houzumi, N. Toyoda, K. Mochiji, T. Mitamura and I. Yamada, “Cluster size dependences of bombardment effects using mass-selected gas cluster ion beams”, Nucl. Instrum. Methods Phys. Res., Sect. B, 261, (2007), 660-663.

  53. S. Nakazawa, N. Toyoda, K. Mochiji, T. Mitamura, and I. Yamada, “Fluoride thin film formation with low optical absorption by gas cluster ion beam assisted deposition”, Nucl. Instrum. Methods Phys. Res., Sect. B, 261, (2007), 656-659.

  54. N. Toyoda, S. Houzumi, T. Mashita. T. Mitamura, K. Mochiji and I. Yamada, ”Novel precision machining using gas cluster ion beams”, Surf. Coat. Technol., 201, (2007), 8624-8627.

  55. N. Toyoda, Y. Maeshima and I. Yamada, ”Cluster size dependence on energy and velocity distributions of gas cluster ions after collisions with residual gas”, Nucl. Instrum. Methods Phys. Res., Sect. B, 257, (2007), 662-665.

  56. N. Toyoda and I. Yamada, “MgF2 and LaF3 thin film formation with gas cluster ion beam assisted deposition”, Surf. Coat. Technol., 201, (2007), 8620-8623.

  57. N. Toyoda and I. Yamada, “Low-damage processing using size-controlled gas cluster ion beams”, Nucl. Instrum. Methods Phys. Res., Sect. B, 261, (2007), 643-646.

  58. I. Yamada and N. Toyoda, “Nano-scale surface modification using gas cluster ion beams - A development history and review of the Japanese nano-technology program”, Surf. Coat. Technol., 201, (2007), 8579-8587.

  59. Y. Haruyama, T. Kitagawa, K. Kanda, S. Matsui, T. Gejo, N. Toyoda and I. Yamada, “X-ray photoelectron spectroscopy study of diamond-like carbon thin films formed by Ar gas cluster ion beam-assisted fullerene Deposition”, Jpn. J. Appl. Phys., 47, (2008), 3380-3383.

  60. H. Isogai, E. Toyoda, T. Senda, K. Izunome, K. Kashima, N. Toyoda and I. Yamada, ”Dependence of recovery of Si surface damaged by GCIB irradiation on annealing temperature”, Nucl. Instrum. Methods Phys. Res., Sect. B, 266, (2008), 2533-2536.

  61. N. Toyoda and I. Yamada, ”Cluster size dependence of surface morphology after gas cluster ion bombardments”, Nucl. Instrum. Methods Phys. Res., Sect. B, 266, (2008), 2529-2532.

  62. K. Moritani, S. Houzumi, K. Takeshima, N. Toyoda and K. Mochiji, “Preferential sputtering of DNA molecules on a graphite surface by Ar cluster ion beam”, J. Phys. Chem. C, 112, (2008), 11357-11362.

  63. N. Toyoda and I. Yamada, “Gas cluster ion beam equipment and applications for surface processing”, IEEE Trans. Plasma Sci., 36, (2008), 1471-1488.

  64. K. Nagato, H. Tani, Y. Sakane, N. Toyoda, I. Yamada, M. Nakao and T. Hamaguchi, “Study of gas cluster ion beam planarization for discrete track magnetic disks”, IEEE Trans. Magn., 44, (2008), 3476-3479.

  65. K. Moritani, M. Hashinokuchi, J. Nakagawa, T. Kashiwagi, N. Toyoda and K. Mochiji, “Extremely low-energy projectiles for SIMS using size-selected gas cluster ions“, Appl. Surf. Sci., 255, (2008), 948-950.

  66. M. Hashinokuchi, K. Moritani, J. Nakagawa, T, Kashiwagi, N. Toyoda and K. Mochiji, “Secondary ion mass spectrometry using size-selected gas cluster ion beam”, J. Surf. Anal., 14, (2008), 387-390.

  67. K. Mochiji, M. Hashinokuchi, K. Moritani and N. Toyoda, “Matrix-free detection of intact ions from proteins in argon-cluster secondary ion mass spectrometry“, Rapid Commun. Mass Spectrom., 23, (2009), 648-652.

  68. N. Toyoda, K. Nagato, H. Tani, Y. Sakane, M. Nakao, T. Hamaguchi and I. Yamada, “Planarization of amorphous carbon films on patterned substrates using gas cluster ion beams”, J. Appl. Phys., 105, (2009), 07C127-1-3.

  69. N. Toyoda and I. Yamada, “Size effects of gas cluster ions on beam transport, amorphous layer formation and sputtering“, Nucl. Instrum. Methods Phys. Res., Sect. B, 267, (2009), 1415-1419.

  70. N. Toyoda, T. Hirota, K. Nagato, H.Tani, Y. Sakane, T. Hamaguchi, M. Nakao and I. Yamada, “Planarization of Bit-Patterned Surface Using Gas Cluster Ion Beams“, IEEE Trans. Magn., 45, (2009), 3503-3506.

  71. T. Hirota., N. Toyoda, A. Yamamoto and I. Yamada, “Modification and smoothing of patterned surface by gas cluster ion beam irradiation“, Appl. Sur. Sci., 256, (2009), 1110-1113.

  72. T. Mashita, N. Toyoda and I. Yamada, “Cluster size dependence of SiO2 thin film formation by O2 gas cluster ion beams”, Appl. Surf. Sci., 256, (2009), 1106-1109.

  73. Y. Haruyama, T. Kitagawa, S. Matsui, N. Toyoda and I. Yamada, “Photoelectron Spectroscopy Study of the Valence Band Region in Diamond-Like Carbon Thin Films”, Jpn. J. Appl. Phys., 48, (2009), 092301-1-4.

  74. T. Araki, Y. Daiko, A. Mineshige, M. Kobune, N. Toyoda, I. Yamada and T. Yazawa, “First‐Principles Calculation and Proton Transfer in TiO2‐Modified Porous Glass”, J. Am. Ceram. Soc., 93, (2009), 127-131.

  75. F. Machida, Y. Daiko, A. Mineshige, M. Kobune, N. Toyoda, I. Yamada and T. Yazawa, “Structures and Photocatalytic Properties of Crystalline Titanium Oxide‐Dispersed Nanoporous Glass–Ceramics”, J. Am. Ceram. Soc., 93, (2009), 461-464.

  76. M. Tanaka, K. Moritani, T. Hirota, N. Toyoda, I. Yamada, N. Inui and K. Mochiji, “Enhanced surface sensitivity in secondary ion mass spectrometric analysis of organic thin films using size-selected Ar gas-cluster ion projectiles“, Rapid Commun. Mass Spectrom., 24, (2010), 1405-1410.

  77.  T. Mashita, N. Toyoda and I. Yamada, “Surface smoothing of polycrystalline substrates with gas cluster ion beams“, Jpn. J. Appl. Phys., 49, (2010), 06GH09-1-3 .

  78. N. Toyoda, T. Hirota, T. Mashita and I. Yamada, “Refilling and planarization of patterned surface with amorphous carbon films by using gas cluster ion beam assisted deposition“, Jpn. J. Appl. Phys., 49, (2010), 6GH13-1-4.

  79. N. Toyoda, T. Hirota, I. Yamada, H. Yakushiji, T. Hinoue, T. Ono and H. Matsumoto, ”Fabrication of planarized discrete track media using gas cluster ion beams“, IEEE Trans. Magn., 46, (2010), 1599-1602.

  80. K. Nagato, H. Hoshino, H. Naito, T. Hirota, H. Tani, Y. Sakane, N. Toyoda, I. Yamada, M. Nakao and T. Hamaguchi, “Planarization of nonmagnetic films on bit patterned substrates by gas cluster ion beams“, IEEE Trans. Magn., 46, (2010), 2504-2506.

  81. N. Toyoda, I. Yamada, H.Tani and Y. Sakane. “Surface characterization and lubricant performance on amorphous carbon films irradiated with gas cluster ion beams“, IEEE Trans. Magn., 46, (2010), 1464-1466.

  82. N. Toyoda and I. Yamada, “Dependence of energy per molecule on sputtering yields with reactive gas cluster ions“, Nucl. Instrum. Methods Phys. Res., Sect. B, 268, (2010), 3291-3294.

  83. K. Nagato, N. Toyoda, H. Naito, H. Tani, Y. Sakane, I. Yamada, M. Nakao and T. Hamaguchi, “Effect of duty ratio of patterned surface on planarization by gas cluster ion beams“, J. Appl. Phys., 109, (2011), 07B733-1-3.

  84. T. Ryo, D-C. Nguyen, M. Nakagiri, N. Toyoda, H. Matsuyoshi and S. Ito, “Characterization of superstrate type CuInS2 solar cells deposited by spray pyrolysis method”, Thin Solid Films, 519, (2011), 7184-7188.

  85. N. Toyoda and I. Yamada, “Reduction of irradiation damage using size- controlled nitrogen gas cluster ion beams“, Nucl. Instrum. Methods Phys. Res., Sect. B, 273, (2012), 11-14.

  86. T. Suda, N. Toyoda, K. Hara and I. Yamada “Development of Cu etching using O2 cluster ion beam under acetic acid gas atmosphere“, Jpn. J. Appl. Phys., 51, (2011), 08HA02-1-5.

  87. H. Sasaki, M. Nakagiri, S. Matsuda, N. Toyoda and H. Kishi, “Peel Adhesive Properties of Polymer Laminates Composed of Polyethylenes and Polypropylenes”, Int. Polymer Processing, 27, (2012), 252-258.

  88. N. Toyoda and I. Yamada, “Gas Cluster Ion Beam Technology for Nano-Fabrication”, Advances Sci. Technol., 82, (2012), 1-8.

  89. N. Toyoda and I. Yamada “Evaluation of charge state of gas cluster ions by means of individual crater observations“, Nucl. Instrum. Methods Phys. Res., Sect. B, 307, (2013), 269-272.

  90. A. Yamaguchi, R. Hinoura, N. Toyoda, K. Hara and I. Yamada “Gas cluster ion beam etching under acetic acid vapor for etch-resistant material“, Jpn. J. Appl. Phys., 52, (2013), 05EB05-1-4.

  91. N. Toyoda, A. Fujimoto and I. Yamada “Magnetic properties of Fe7Co3 films with gas cluster ion beam irradiations“, J. Appl. Phys., 113, (2013), 17A328-1-3.

  92. K. Sumie, N. Toyoda and I. Yamada, “Surface morphology and sputtering yield of SiO2 with oblique-incidence gas cluster ion beam“, Nucl. Instrum. Methods Phys. Res., Sect. B, 307, (2013), 290-293.

  93. N. Toyoda, A. Fujimoto and I. Yamada, “Irradiation effects of gas cluster ion beams on Co-Fe films“, Jpn. J. Appl. Phys., 52, (2013), 06GF01-1-4.

  94. E. J. Teo, N. Toyoda, C. Yang, B. Wang, N. Zhang, A. A. Bettiol and J. H. Teng, “Sub-30 nm thick plasmonic films and structures with ultralow loss“, Nanoscale, 6, (2014), 3243-3249.

  95. K. Moritani, K. Mochiji, N. Inui, N. Toyoda and I. Yamada, “Surface sensitive analysis of organic compound using size-selected Ar gas cluster SIMS”, J. Vac. Soc. Japan, 57, (2014), 173-178.

  96. R. Hinoura, A. Yamaguchi, N. Toyoda, K. Hara and I. Yamada, “In situ X-ray photoelectron spectroscopy study of gas cluster ion beam etching of FeCo film”, Jpn. J. Appl. Phys., 53, (2014), 03DD05-1-4.

  97. N. Toyoda, K. Sumie, A. Kimura and I. Yamada, “Ripple formations by gas cluster ion irradiation in reactive gas environments”, Jpn J. Appl. Phys., 53, (2014), 05FC01.

  98. N. Toyoda and I. Yamada, “XPS study of effects of water vapor during Ar-GCIB irradiations on PMMA”, Appl. Surf. Sci., 310, (2014), 112-114.

  99. E. J. Teo, N. Toyoda, C. Yang, A. A. Bettiol and J. H. Teng, “Nanoscale smoothing of plasmonic films and structures using gas cluster ion beam irradiation”, Appl. Phys. A, 117, (2014), 719-723.

  100. I. Yamada, J. Matsuo, N. Toyoda, T. Aoki and T. Seki, “Progress and applications of cluster ion beam technology”, Curr. Opin. Solid State Mater. Sci., 19, (2014), 12-18.

  101. N. Toyoda and I. Yamada, “Advancement of Gas Cluster Ion Beam Processes for Chemically Enhanced Surface Modification and Etching”, Physics Procedia, 66, (2015), 556-560.

  102. N. Toyoda, “Surface Smoothing Effects of Materials Used in Underlayer of MTJ with Gas Cluster Ion Beams”, MRS Advances, 1, (2016), 357-362.

  103. N. Toyoda, A. Kimura and I. Yamada, “Isolated crater formation by gas cluster ion impact and their use as templates for carbon nanotube growth”, Nucl. Instrum. Methods Phys. Res., Sect. B, 371, (2016), 317-321.

  104. A. Ogawa, N. Toyoda and I. Yamada, “Incident angle dependence of metal etching using a gas cluster ion beam in acetic acid atmosphere”, Surf. Coat. Technol., 306 (2016), 187-189.

  105. N. Toyoda, “Recent Developments in Gas Cluster Ion Beam Technology”, J. Vac. Soc. Japan, 59, (2016), 121-127.

  106. D. Nakayama, H. Baba, N. Toyoda and I. Yamada, “Relatively low temperature deposition of graphene like films with ethane GCIB irradiation”, Surf. Coat. Technol., 306 (2016), 218-221.

  107. N. Toyoda, and A. Ogawa, “Atomic layer etching of Cu film using gas cluster ion beam”, J. Phys. D, 50, (2017), 184003.

  108. N. Toyoda, T. Sasaki, S. Ikeda, I. Yamada, “Irradiation conditions of gas cluster ion beam for surface-activated bonding”, Jpn. J. Appl. Phys., 57, 02BA02 (2018).

  109. S. Y. Siew, E. J. H. Cheung, H. Liang, A. Bettiol, N. Toyoda, B. Alshehri, E. Dogheche, and A. J. Danner, “Ultra-low loss ridge waveguides on lithium niobate via argon ion milling and gas clustered ion beam smoothening”, Optics Express, 26, 4421-4430 (2018).

 

（2）　査読付き国際会議論文集

 

  1. N. Toyoda, J. Matsuo and I. Yamada, “The sputtering effects of cluster ion beams”, AIP Conf. Proc., 392, (1997), 483-486.

  2. N. Toyoda, J. Matsuo and I. Yamada, “Surface processing by gas cluster ion beams”, Proc. of 11th Int. Conf. on Ion Implantation Technol., (1997), 808-811.

  3. I. Yamada, J. Matsuo, N. Toyoda and T. Aoki, “Applications of cluster ion implantation in microelectronics devices”, AIP Conf. Proc., 475, (1999), 379-382.

  4. A. Nishiyama, M. Adachi, N. Toyoda. Hagiwara, J. Matsuo and I. Yamada, “Surface Smoothing of CVD-Diamond Membrane for X-ray Lithography by Gas Cluster Ion Beam”, AIP Conf. Proc., 475, (1999), 421-424.

  5. J. Matsuo, N. Toyoda, M. Saito, T. Aoki, T. Seki and I. Yamada, “Novel Analysis Techniques using Cluster Ion Beams”, AIP Conf. Proc., 475, (1999), 429-432.

  6. N. Toyoda, M. Saito, N. Hagiwara, J. Matsuo and I. Yamada, “Cluster size measurement of large Ar cluster ions with time of flight”, Proc. of 12th Int. Conf. on Ion Implantation Technol., (1999), 1234-1237.

  7. N. Hagiwara, N. Toyoda, J. Matsuo and I. Yamada, “Monte Carlo simulation of surface smoothing effect by cluster ions”, Proc. of 12th Int. Conf. on Ion Implantation Technol., (1999), 1230-1233.

  8. M. Saito, N. Hagiwara, N. Toyoda, J. Matsuo and I. Yamada, “Formation of complex clusters in Ar/O2 gas cluster beams”, Proc. of 12th Int. Conf. on Ion Implantation Technol., (1999), 1226-1229.

  9. D. Fenner, R. P. Torti, L. P. Allen, N. Toyoda, A. R. Kirkpatrick, J. Greer, V. Difilippo and J. Hautala, “Etching and Surface Smoothing with Gas-Cluster Ion Beams”, Mat. Res. Soc. Symp. Proc., 585, (1999), 27-32.

  10. N. Toyoda, K. K. Lee, H-C. Luan, D. R. Lim, A. Agarwal, K. Wada, L. C. Kimerling and L. P. Allen, “Surface Smoothing of Polycrystalline Si Waveguides With Gas-Cluster Ion Beams”, Mat. Res. Soc. Symp. Proc., 597, (1999), 51-55.

  11. N. Toyoda, T. Aoki, J. Matsuo, I. Yamada, K .Wada and L. C. Kimerling, “Photoluminescence study of defects induced by B10H14 ions”, Mat. Res. Soc. Symp., 669, (2001), J4.20.1-6.

  12. N. Toyoda, K. Shirai, M. Terasawa, S. Matsui and I. Yamada, “High Quality Optical Film Formation with O2 Cluster Ion Assisted Deposition”, Mat. Res. Soc. Symp. Proc., 697, (2001), P5.20.1-6.

  13. N. Toyoda and I. Yamada, “Improvement of surface roughness by ultra-thin film deposition with oxygen cluster ion beam assist deposition”, Mat. Res. Soc. Symp. Proc., 749, (2002), W17.7.1-5.

  14. T. Kitagawa, K. Miyauchi, N. Toyoda, K. Kanda, S. Matsui, H. Tsubakino, J. Matsuo and I. Yamada, “NEXAFS study of DLC films prepared by Ar cluster and monomer ion assisted deposition”, Proc. of 14th Int. Conf. on Ion Implantation Technol., (2003), 587-590.

  15. Z. Insepov, N. Toyoda and I. Yamada, L. P. Allen, C. Santeufemio, “Computer modeling and electron microscopy of silicon surfaces irradiated by cluster ion impacts”, Proc. of 14th Int. Conf. on Ion Implantation Technol, (2003), 571-574.

  16. K. Miyauchi, T. Kitagawa, N. Toyoda, K. Kanda, S. Matsui and I. Yamada, “Study of flux Ratio of C60 to Ar cluster ion for hard DLC film deposition”, AIP Conf. Proc., 680, (2003), 719-722.

  17. T. Kitagawa, K. Miyauchi, K. Kanda, S. Matsui, N. Toyoda, H. Tsubakino, J. Matsuo and I. Yamada, “Difference of Irradiation Effects between Ar Cluster Ion and Ar+ for DLC film formation”, AIP Conf. Proc., 680, (2003), 755-758.

  18. S. Houzumi, N. Toyoda and I. Yamada, “Surface Smoothing of Compound Semiconductor Substrates with Gas Cluster Ion Beams”, AIP Conf. Proc., 680, (2003), 723-726.

  19. N. Toyoda and I. Yamada, “Optical thin film deposition with O2 cluster ion beam assisted deposition”, AIP Conf. Proc., 680, (2003), 711-714.

  20. N. Toyoda, S. Houzumi, T. Aoki and I. Yamada, “Experimental Study of Cluster Size Effect with Size-selected Cluster Ion Beam System”, Mat. Res. Soc. Symp. Proc., 792, (2004), R10.8.1-6.

  21. M. Nagano, S. Houzumi, N. Toyoda, S. Yamada, S. Akita and I. Yamada, “High rate etching of GaAs and GaP by gas cluster ion beams”, Mat. Res. Soc. Symp. Proc., 792, (2003), R9.38.1-6.

  22. N. Toyoda and I. Yamada, “Nano structure formation by gas cluster ion beam irradiations at oblique incidence”, Mat. Res. Soc. Symp. Proc., 849 (2004), KK7.9.1-5.

  23. H. Isogai, E. Toyoda, T. Senda, K. Izunome, K. Kashima, N. Toyoda and I. Yamada, “Cross-sectional TEM Observations of Si Wafers Irradiated With Gas Cluster Ion Beams”, AIP Conf. Proc., 866, (2006), 194-197.

  24. N. Toyoda and I. Yamada, “Cluster size effects of gas cluster ion beams on surface modification”, AIP Conf. Proc., 886, (2006), 210-213.

  25. I. Yamada and N. Toyoda, “Cluster Ion Beam Process for Nanofabrication”, Mat. Res. Soc. Symp. Proc., 1020, (2007), 1020-GG01-02.

  26. N. Toyoda and I. Yamada, “Cluster Size Dependence of Etching by Reactive Gas Cluster Ion Beams”, AIP Conf. Proc., 1066, (2008), 427-430.

  27. N. Toyoda, H. Isogai and I. Yamada, “Non-Contact Wafer Fabrication Process Using Gas Cluster Ion Beams”, AIP Conf. Proc., 1066, (2008), 431-433.

  28. I. Yamada, J. Matsuo and N. Toyoda, “Summary of Industry‐Academia Collaboration Projects on Cluster Ion Beam Process Technology”, AIP Conf. Proc., 1066, (2008), 415-418.

  29. I. Yamada and N. Toyoda, “Review of Cluster Ion Beam Facilities and Technology“, AIP Conf. Proc., 1099, (2009), 13-16.

  30. N. Toyoda and I. Yamada, “Energy loss and beam transport properties of gas cluster ion beams“, AIP Conf. Proc., 1099, (2009), 21-24.

  31. H. Isogai, E. Toyoda, K. Izunome, K. Kashima, T. Mashita, N. Toyoda and I. Yamada, “Precise fabrication of silicon wafers using gas cluster ion beams“, AIP Conf. Proc., 1099, (2009), 35-38.

  32. K. Naito, N. Toyoda and I. Yamada, “Preferential refilling and planarization of grooves with amorphous carbon by using gas cluster ion beam irradiations“, AIP Conf. Proc., 1321, (2011), 306-309.

  33. T. Suda, M. Nakagiri, N. Toyoda and I. Yamada, “Vacuum pressure dependence on surface reaction induced by gas cluster ions studied with in-situ XPS“, AIP Conf. Proc., 1321, (2011), 290-293.

  34. M. Nakagiri, N. Toyoda and I. Yamada, “X-ray photoelectron spectroscopy analysis of organic materials irradiated with gas cluster ion beam“, AIP Conf. Proc., 1321, (2011), 321-324.

  35. N. Toyoda, T. Mashita and I. Yamada, “Ultra-thin surface modification with nitrogen gas cluster ion beams“, AIP Conf. Proc., 1321, (2011), 286-289.

  36. N. Toyoda and I. Yamada, “Cross-sectional TEM study of surface modification of nano-structure with gas cluster ion beams“, Mat. Res. Soc. Symp. Proc., 1298, (2011), 173-178.

  37. M. Nakagiri, N. Toyoda and I. Yamada, “Low-damage processing of organic materials with size-controlled gas cluster ion beams“, Mat. Res. Soc. Symp. Proc., 1288, (2011), 91.

  38. T. Suda, N. Toyoda and I. Yamada, “High-rate etching of organic materials using gas cluster beam“, Mat. Res. Soc. Symp. Proc., 1288, (2011), 31.

  39. J. Cai, K. Sumie, N. Toyoda, Y. Ishikawa and K. Wada, “Gas cluster ion beam treatment for silicon waveguide trimming”, Proc. of IEEE 9th Int. Conf. on Group IV Photonics, (2012), 352-354.

  40. N. Toyoda and I. Yamada, “Metal etching with reactive gas cluster ion beams using pickup cell“, AIP Conf. Proc., 1496 (2012) 288-291.

  41. N. Toyoda, A. Kimura and I. Yamada, “Increase of sp3 content in a-C films with gas cluster ion beam bombardments; XPS and NEXAFS study”, Proc. of 20th Ion Implantation Technol, 2014), 1-3.

  42. T. Sasaki, N. Toyoda and I. Yamada, “Surface Modification and Activation with Gas Cluster Ion Beam”, Proc. of 21st Ion Implantation Technol., (2017), 59-61.

  43. N. Toyoda and I. Yamada, “Low Temperature Graphene Film Formation with Ethane Cluster Ion Implantation”, Proc. of 21st Ion Implantation Technol., (2017), 318-320.

  44. Y. Uozumi, N. Toyoda and I. Yamada, “Surface Modification of PEEK with Gas Cluster Ion Beam Irradiation”, Proc. of 21st Ion Implantation Technol., (2017), 89-91.

 

（3）査読無し国際会議論文集

 

  1. L. P. Allen, D. Fenner, W. J. Skinner, R. Chandonnet, S. E. Deziel, R. P. Torti and N. Toyoda, “SIMOX SOI surface smoothing for gate oxide integrity and reliability”, Proc. of 1999 IEEE Int. SOI Conf. (Oct. 4-7, 1999, Rohnert Park, CA, USA) (1999), 116.

  2. N. Toyoda, I. Yamada and K. Wada, “Giant cluster beam interaction with wide bandgap surfaces”, Proc. of Workshop on near-surface effects in semiconductor substrates, (Aug. 5-10, 2001, Kodiak Island, Alaska, USA), (2001), 17.

  3. K. Shirai, Y. Fujiwara, R. Takahashi, N. Toyoda, S. Matsui, T. Mitamura, M. Terasawa, H. Tsubakino and I. Yamada, “Durable optical film formation with O2 cluster ion assisted deposition”, Digest papers of 2001 Int. Microprocesses Nanotechnol. Conf., (Oct. 31 – Nov. 2, 2001, Matsue, Japan), (2001), 114-115.

  4. N. Toyoda, S. Matsui and I. Yamada, “Ultra-smooth surface preparation with gas cluster ion beams”, Digest papers of 2001 Int. Microprocesses Nanotechnol. Conf., (Oct. 31 – Nov. 2, 2001, Matsue, Japan), (2001), 32-33.

  5. N. Toyoda, J. Matsuo, T. Aoki and I. Yamada, D. B. Fenner, “Secondary Ion Mass Spectrometry with Gas Cluster Ion Beams”, Proc. of 13th Int. Conf. Secondary Ion Mass Spectrometry and Related Topics, (Nov. 11-16, 2001, Nara, Japan), (2001), 72.

  6. M. Taniguchi, T. Kawai, K. Watanabe, S. Matsui, N. Toyoda, I. Yamada, T. Kubota and S. Mashik, “Fabrication of flat electrodes with nano-gaps using cluster ion beams”, Digest  Papers of 2002 Microprocesses Nanotechnol. Conf., (Nov. 6-8, 2002, Tokyo, Japan), 152-153.

  7. T. Kitagawa, K. Miyauchi, K. Kanda, Y. Shimizugawa, N. Toyoda, H. Tsubakino, S. Matsui, T. Gego, J. Matsuo and I. Yamada, “NEXAFS study for optimization of hard DLC films formation with Ar cluster ion beam”, Digest Papers of 2002 Microprocesses Nanotechnol. Conf., (Nov. 6-8, 2002, Tokyo, Japan), 90-91.

  8. Y. Fujiwara, N. Toyoda, I. Yamada and M. Sato, “Nb2O5/SiO2 multilayer films formation using O2 gas cluster ion beam deposition”, Digest papers of 2002 Microprocesses Nanotechnol. Conf., (Nov. 6-8, 2002, Tokyo, Japan), 228-229.

  9. S. Inoue, Y. Fujiwara, N. Toyoda, I. Yamada and H. Tsubakino, “Incident angle dependence of O2 cluster ions on Ta2O5 thin film properties”, Digest papers of 2003 Microprocesses Nanotechnol. Conf., (Oct. 29-31, 2003, Tokyo, Japan), (2003), 268-269.

  10. T. Kitagawa, K. Miyauchi, N. Toyoda, H. Tsubakino and I. Yamada, “Optimum incident angle of Ar cluster ion beam for super hard carbon film deposition”, Digest papers of 2003 Microprocesses Nanotechnol. Conf., (Oct. 29-31, 2003, Tokyo, Japan), (2003), 328-329.

  11. N. Toyoda, I. Yamada, S. Niisaka and M. Sato, “High quality optical thin film deposition with gas cluster ion beam assisted deposition”, Proc. of Optical Interference Coatings 2004 (June 28 - July 1, 2004, Tuscon, AZ, USA), (2004), MB5.

  12. T. Kitagawa, N. Toyoda, H. Tsubakino, J. Matsuo and I. Yamada, “Comparison of irradiation effects between cluster and monomer for DLC film deposition”, Proc. of Int. Symp. Novel Materials Processing by Advanced Electromagnetic Energy Sources, (Mar. 19-22, 2004, Osaka, Japan), (2005), 245-248.

  13. Y. Fujiwara, S. Inoue, T. Nose, K. Mochiji, T. Mitamura, N. Toyoda and I. Yamada, “High quality thin film formation with gas cluster ion beam assisted deposition system”, Proc. of Int. Symp. Novel Mater. Processing by Advanced Electromagnetic Energy Sources, (Mar. 19-22, 2004, Osaka, Japan), (2005), 235-239.

  14. S. Houzumi, T. Mashita, N. Toyoda, K. Mochiji, T. Mitamura and I. Yamada, “Morphology dependence of surface smoothing of Ar gas cluster ion beams”, Proc. of Int. Symp. Novel Mater. Processing by Advanced Electromagnetic Energy Sources, (Mar. 19-22, 2004, Osaka, Japan), (2005), 241-244.

  15. N. Toyoda, S. Houzumi, T. Aoki and I. Yamada, “Experimental study of cluster impact with size-selected cluster beam”, Proc. of Int. Symp. Novel Mater. Processing by Advanced Electromagnetic Energy Sources, (Mar. 19-22, 2004, Osaka, Japan), (2005), 219-222.

  16. N. Toyoda, I. Yamada, S. Akiyama, L. C. Kimerling, Y. Ishikawa and K. Wada, “Gas Cluster Ion Beam Processing for Si Photonics”, Proc. of 4th Int. Conf. Group IV Photonics, (Sep. 19-21, 2007, Tokyo, Japan), (2007), 58-60.

  17. N. Toyoda, “Surface Roughness Reduction using Gas Cluster Ion Beams for Si Photonics“, Proc. of 5th Int. Symp. on Adv. Sci. and Technol. of Si Mater., (Nov. 13-14, 2008, Kona, HI, USA), (2008), 362-365.

  18. T. Mashita, N. Toyoda and I. Yamada, “Surface smoothing of polycrystalline substrates with gas cluster ion beams”, Digest papers of 2009 Microprocesses Nanotechnol. Conf., (16-19 Nov., 2009, Sapporo, Japan), (2009), 284-285.

  19. N. Toyoda, T. Hirota, T. Mashita, H. Tani, K. Nagato, T. Hamaguchi and M. Nakao, “Planarization of patterned surface using N2 cluster ion beams”, Digest papers of 2009 Microprocesses Nanotechnol. Conf., (16-19 Nov., 2009, Sapporo, Japan), (2009), 576-577.

  20. N. Toyoda and I. Yamada, “Gas cluster ion beam process for high-quality thin film deposition”, Technical Digest of Optical interference coating 2010, (June 6-11, 2010, Tucson, AZ, USA) (2010), TuD1.

  21. B. V. King, I. Veryovkin, A. Z. Zinovev, C. E. Tripa, M. J. Pellin, N. Toyoda, I. Yamada and M. Schmeling, “Ion Beam Removal of Surface Contamination in Genesis Samples”, 41st Lunar Planetary Sci. Conf., (Mar. 1-5, 2010, The Woodlands, TX, USA), (2010), 1975.

  22. T. Suda, N. Toyoda, K. Hara and I. Yamada, “Development of Cu etching using O2-GCIB under acetic acid gas atmosphere”, 33rd Int. Symp. Dry Process (Nov. 10-11, 2011, Kyoto, Japan), (2011), 169-170.

  23. I. Veryokin, S. V. Baryshev, N. G. Becker, D. S. Burnett, Y. Choi, P. J. Eng, J. E. Stubbs, M. Schmeling, N. Toyoda, C. E. Tripa and I. Yamada, A. V. Zinovev, “Cleaning Genesis Samples with Gas Cluster Ion Beams: Method Evaluation by Comparative Studies with RIMS, GI-XRF and Other Surface Characterization Techniques”, 43rd Lunar Planetary Science Conf., (The Woodlands, TX, USA 2012), (2012) 2732.

  24. N. Toyoda, I. Yamada, “New gettering method for thinned Si using gas cluster ion beam”, 6th Int. Symp. on Adv. Sci. and Technol. of Si Mater., (Nov. 19-23, 2012, Kona, Hawaii, USA), (2012), 231-233.

  25. A. Yamaguchi, R. Hinoura, N. Toyoda, K. Hara and I. Yamada, “GCIB etching under acetic acid vapor for etch-resistant materials”, 34th Int. Symp. Dry Process, (Nov. 15-16, 2012, Tokyo, Japan), (2012), 165-166.

  26. N. Toyoda, A. Yamaguchi, A. Fujimoto and I. Yamada, “Crystallization of surface layer of magnetic films with gas cluster ion beams”, Digest papers of 2012 Microprocesses Nanotechnol. Conf., (30 Oct. – 2 Nov., 2012, Kobe, Japan), 2P-11-35.

  27. A. Fujimoto, N. Toyoda and I. Yamada, “In-situ XPS study of Ionization Conditions of Gas Cluster Ion Beam for Low Damage Processing”, JSAP-MRS Joint Symp. for 2013 JSAP Autumn Meeting (16 – 20, Sep., 2013, Kyoto, Japan), (2013), B-6531.

  28. N. Toyoda, K. Sumie, A. Kimura and I. Yamada, “Ripple formations by gas cluster ions in ambient reactive gas”, JSAP-MRS Joint Symp. for 2013 JSAP Autumn Meeting (16 – 20, Sep., 2013, Kyoto, Japan), (2013), B-6261.

  29. R. Hinoura, A. Yamaguchi, N. Toyoda, K. Hara and I. Yamada, “In-situ XPS study of GCIB etching for materials used in STT-MRAM”, 35th Int. Symp. Dry Process, (Aug. 29-30, 2013, Jeju, Korea), (2013), 55-56.

  30. N. Toyoda, A. Fujimoto, A. Yamaguchi and I. Yamada, “Etching of FeCo films with gas cluster ion beams and their magnetic properties”, 12th Joint MMM-Intermag Conf. (Jan. 14-18, 2013, Chicago, IL, USA), (2013), AX-11.

  31. N. Toyoda, M. Kojima, R. Hinoura, A. Yamaguchi, K. Hara and I. Yamada, “Cu pattern etching by oxygen gas cluster ion beams with acetic acid vapor”, 2014 IEEE Int. Interconnect Technol. Conf. / Adv. Metallization Conf., (May 20-23, 2014, San Jose, CA, USA), (2014), 277-279.

  32. E. J. Teo, N. Toyoda, C. Yang, B. Wang, N. Zhang, A. A. Bettiol and J. H. Teng, “Enhanced plasmonic performance in ultrathin silver structures using Gas Cluster Ion Beam Irradiation”, OSA Technical Digest, (2014), FF1K.2.

  33. N. Toyoda, A. Kimura, M. Hayashi, A. Tomita, H. Tani and I. Yamada, “Surface treatment of a-C surface with GCIB and floating characteristics of HDD sliders”, 15th IUMRS-Int. Conf. in Asia (24-30, Aug., 2014, Fukuoka, Japan), (2014), D1-O25-004.

  34. N. Toyoda and I. Yamada, “Gas cluster ion beam etching for etch-resistant materials”, Plasma Conf. 2014, (18-21, Nov., 2014, Niigata, Japan), (2014), S10-5.

  35. N. Toyoda and I. Yamada, “Gas Cluster Ion Beam Stimulated Reaction with Adsorbed Molecules on Metal Surface”, 59th Int. Conf. on Electron, Ion, and Photon Beam Technolol. Nanofabrication, (May 26-29, 2015, San Diego, CA, USA), (2015), 3C3.

  36. N. Toyoda, “Development of Non-contact Hardness Measurements with Crater Formations by Gas Cluster Ions”, 16th Int. Conf. Nanotechnol., (22-25 Aug. 2016, Sendai, Japan), (2016), 381-382.

  37. N. Toyoda, “Surface Planarization of Wide-gap Semiconductor with Gas Cluster Ion Beams”, Workshop on ultra-precision processing for wide band gap semiconductors 2016, (Oct. 30 – Nov. 2, 2016, Hsinchu, Taiwan), (2016), 8.

  38. N. Toyoda, “Surface activation and planarization with gas cluster ion beam for wafer bonding”, Pacific Rim Meeting on Electrochemical Solid-state Sci., (Oct. 2-7, 2016, Honolulu, Hawaii, USA), (2016), H02-2066.

  39. N. Toyoda, T. Sasaki, S. Ikeda and I. Yamada, “Gas cluster ion beam irradiation for wafer bonding”, 5th Int. Workshop on Low Temperature Bonding for 3D Integration (May 16-18, Tokyo, Japan, 2017) (2017), 5.

  40. S. Ikeda, T. Sasaki and N. Toyoda, “Optimization of GCIB irradiation conditions for surface activated bonding”, 5th Int. Workshop on Low Temperature Bonding for 3D Integration (May 16-18, Tokyo, Japan, 2017) (2017), 66.

  41. N. Toyoda, “Atomic layer etching with gas cluster ion beams”, 23rd Int. Conf. on Ion Surface Interactions, (21-25 Aug., 2017, Moscow, Russia), (2017), 50-55.

  42. N. Toyoda and A. Ogawa, “Atomic layer etching with gas cluster ion beams”, 15th Int. Conf. on Adv. Mater., (28 Aug. –1 Sep., 2017, Kyoto, Japan), (2017), D1-O29-003.

 

（4）　解説・総説

  1. 真空ジャーナル　2008年11月号　【特集】ガスクラスターイオンビームを利用した微細加工 ガスクラスターイオンビーム（GCIB）を利用した高精度ナノ加工

  2. 豊田 紀章、山田 公　”ガスクラスターイオンビームによる超精密加工”　精密工学会誌, 82 (2016) 315.

  3. 豊田紀章, "ガスクラスターイオンビーム励起による表面反応と原子層エッチングへの応用", 表面と真空, vol. 63, No. 12, pp. 623-628 (2020).

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